| 000 -LEADER | |
|---|---|
| fixed length control field | 03135cgm a2200433Ia 4500 |
| 001 - CONTROL NUMBER | |
| control field | 31624 |
| 003 - CONTROL NUMBER IDENTIFIER | |
| control field | AE-DuAU |
| 005 - DATE AND TIME OF LATEST TRANSACTION | |
| control field | 20241122121747.0 |
| 007 - PHYSICAL DESCRIPTION FIXED FIELD--GENERAL INFORMATION | |
| fixed length control field | vd cvaizz |
| 008 - FIXED-LENGTH DATA ELEMENTS--GENERAL INFORMATION | |
| fixed length control field | 050222r20041999cau031 vleng d |
| 050 14 - LIBRARY OF CONGRESS CALL NUMBER | |
| Classification number | TK7874 |
| Item number | .S5526 2004 |
| 090 ## - LOCALLY ASSIGNED LC-TYPE CALL NUMBER (OCLC); LOCAL CALL NUMBER (OCLC) | |
| Classification number (OCLC) (R) ; Classification number, CALL (RLIN) (NR) | DVD TK 7874 .S5526 2004 |
| 245 00 - TITLE STATEMENT | |
| Title | Silicon run lithography |
| Medium | [videorecording] / |
| Statement of responsibility, etc | a film by Ruth A. Carranza [in collaboration with the Stanford Nanofabrication Facility] ; producer/director, Ruth A. Carranza ; writers, Ruth Carranza, John Shott. |
| 246 30 - VARYING FORM OF TITLE | |
| Title proper/short title | Lithography |
| 246 3# - VARYING FORM OF TITLE | |
| Title proper/short title | Silicon run. |
| 260 ## - PUBLICATION, DISTRIBUTION, ETC. (IMPRINT) | |
| Place of publication, distribution, etc | Mountain View, CA : |
| Name of publisher, distributor, etc | Ruth Carranza Productions : |
| -- | Silicon Run Productions, |
| Date of publication, distribution, etc | c2004, 1999. |
| 300 ## - PHYSICAL DESCRIPTION | |
| Extent | 1 videodisc (31 min.) : |
| Other physical details | sd., col. ; |
| Dimensions | 4 3/4 in. |
| 490 1# - SERIES STATEMENT | |
| Series statement | Silicon Run films series |
| 538 ## - SYSTEM DETAILS NOTE | |
| System details note | DVD; NTSC. |
| 508 ## - CREATION/PRODUCTION CREDITS NOTE | |
| Creation/production credits note | Producer/director Ruth A. Carranza ; writers Ruth Carranza, John Shott ; cinematographer, Wah Ho Chan ; editor, Pam Walton ; narrator, Susan Jerome, music, Neil Panton. |
| 500 ## - GENERAL NOTE | |
| General note | A presentation of Intel Foundation, Nikon Precision, Shipley, Cymer, Applied Materials, Inc., Semiconductor Equipment and Materials International, Stanford Nanofabrication Facility. |
| 520 ## - SUMMARY, ETC. | |
| Summary, etc | Features an in-depth look at the photolithography process in IC manufacturing, includes wafer preparation, photoresist coating, exposure (using i-line steppers and DUV scanners), wafer developing and inspection. |
| 505 00 - FORMATTED CONTENTS NOTE | |
| Miscellaneous information | 1. |
| Title | Introduction -- |
| Miscellaneous information | 2. |
| Title | Fabrication overview -- |
| -- | IC design -- |
| -- | Mask design & manufacture -- |
| -- | Fabrication processes -- |
| Miscellaneous information | 3. |
| Title | Photolithography station -- |
| -- | Exposure systems -- |
| -- | Track system -- |
| -- | Photolithography chemicals -- |
| -- | Photoresist manufacture -- |
| -- | Resist viscosity & tolerances -- |
| -- | I-line exposure light source -- |
| Miscellaneous information | 4. |
| Title | Track system -- |
| -- | Dehydration bake -- |
| -- | Wafer prime -- |
| -- | Resist spread -- |
| -- | Edge bead dissolve -- |
| -- | Soft bake -- |
| Miscellaneous information | 5. |
| Title | I-line stepper -- |
| -- | Mask -- |
| -- | 5:1 image reduction -- |
| -- | Wafer stage -- |
| -- | Exposure light path -- |
| -- | Step and expose system -- |
| -- | Wafer develop -- |
| -- | Wafer rinse and dry -- |
| -- | Hard bake -- |
| -- | Wafer inspection -- |
| Miscellaneous information | 6. |
| Title | DUV excimer scanner -- |
| -- | Critical dimensions -- |
| -- | Exposure wave length -- |
| -- | Step and scan exposure system -- |
| -- | Anti-reflective coat deposition -- |
| -- | DUV resist -- |
| -- | 4:1 image reduction -- |
| -- | DUV laser exposure -- |
| -- | Hard bake -- |
| -- | Wafer inspection -- |
| Miscellaneous information | 7. |
| Title | Ending and credits. |
| 511 ## - PARTICIPANT OR PERFORMER NOTE | |
| Participant or performer note | Narrator, Susan Jerome. |
| 650 #0 - SUBJECT ADDED ENTRY--TOPICAL TERM | |
| Topical term or geographic name as entry element | Photolithography. |
| 9 (RLIN) | 183391 |
| 650 #0 - SUBJECT ADDED ENTRY--TOPICAL TERM | |
| Topical term or geographic name as entry element | Integrated circuits |
| General subdivision | Design and construction. |
| 9 (RLIN) | 183392 |
| 700 1# - ADDED ENTRY--PERSONAL NAME | |
| Personal name | Carranza, Ruth A., |
| Dates associated with a name | 1949- |
| 9 (RLIN) | 169460 |
| 700 1# - ADDED ENTRY--PERSONAL NAME | |
| Personal name | Shott, John. |
| 9 (RLIN) | 183393 |
| 700 1# - ADDED ENTRY--PERSONAL NAME | |
| Personal name | Jerome, Susan. |
| 9 (RLIN) | 183394 |
| 710 2# - ADDED ENTRY--CORPORATE NAME | |
| Corporate name or jurisdiction name as entry element | Stanford Nanofabrication Facility. |
| 9 (RLIN) | 183395 |
| 710 2# - ADDED ENTRY--CORPORATE NAME | |
| Corporate name or jurisdiction name as entry element | Silicon Run Productions. |
| 9 (RLIN) | 169467 |
| 710 2# - ADDED ENTRY--CORPORATE NAME | |
| Corporate name or jurisdiction name as entry element | Ruth Carranza Productions. |
| 9 (RLIN) | 183396 |
| 710 2# - ADDED ENTRY--CORPORATE NAME | |
| Corporate name or jurisdiction name as entry element | Stanford Nanofabrication Facility. |
| 9 (RLIN) | 183395 |
| 830 #0 - SERIES ADDED ENTRY--UNIFORM TITLE | |
| Uniform title | Silicon Run series |
| 9 (RLIN) | 183397 |
| 907 ## - LOCAL DATA ELEMENT G, LDG (RLIN) | |
| a | |
| b | 02-28-11 |
| c | 02-28-11 |
| 942 ## - ADDED ENTRY ELEMENTS (KOHA) | |
| Koha item type | DVDs |
| 998 ## - LOCAL CONTROL INFORMATION (RLIN) | |
| -- | media |
| Operator's initials, OID (RLIN) | 02-28-11 |
| Cataloger's initials, CIN (RLIN) | m |
| First Date, FD (RLIN) | g |
| -- | - |
| -- | eng |
| -- | cau |
| -- | 0 |
| 945 ## - LOCAL PROCESSING INFORMATION (OCLC) | |
| g | 0 |
| i | 5047745 |
| j | 0 |
| l | media |
| o | - |
| p | 493.15 |
| q | - |
| r | - |
| s | - |
| t | 33 |
| u | 2 |
| v | 2 |
| w | 2 |
| x | 0 |
| y | i12274355 |
| z | 02-28-11 |
| Lost status | Source of classification or shelving scheme | Damaged status | Not for loan | Home library | Current library | Shelving location | Date acquired | Cost, normal purchase price | Total Checkouts | Total Renewals | Full call number | Barcode | Date last seen | Cost, replacement price | Price effective from | Koha item type |
|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|
| Library of Congress Classification | American University in Dubai | American University in Dubai | AUDIO & DVD Collection | 2011-02-28 | 493.15 | 2 | 2 | DVD TK 7874 .S5526 2004 | 5047745 | 2023-10-10 | 493.15 | 2015-07-25 | DVDs |